1

Highly anisotropic selective reactive ion etching of deep trenches in silicon

Year:
1994
Language:
english
File:
PDF, 355 KB
english, 1994
8

Reactive ion etching of silicon submicron-sized trenches in SF6/C2Cl3F3 plasma

Year:
1995
Language:
english
File:
PDF, 1.20 MB
english, 1995
13

Scaling of silicon trench etch rates and profiles in plasma etching

Year:
1999
Language:
english
File:
PDF, 850 KB
english, 1999
17

Plasma Stimulated Impurity Redistribution in Silicon

Year:
1989
Language:
english
File:
PDF, 426 KB
english, 1989
22

Building of an industrial sectionalized pulsational extractor

Year:
1980
Language:
english
File:
PDF, 302 KB
english, 1980
25

Bragg–Fresnel lens with the slope zone structure

Year:
1992
Language:
english
File:
PDF, 473 KB
english, 1992
38

X-ray multilens interferometer based on Si refractive lenses

Year:
2014
Language:
english
File:
PDF, 4.16 MB
english, 2014
39

Hard x-ray single crystal bi-mirror

Year:
2015
Language:
english
File:
PDF, 330 KB
english, 2015
49

Government information at Lied Library

Year:
2005
Language:
english
File:
PDF, 394 KB
english, 2005